Angstrom positioning system using a giant magnetostriction actuator for high power applications

In this paper, an angstrom order positioning system using a giant magnetostriction actuator is proposed and developed. This newly developed system can precisely control several /spl Aring/ positioning over several /spl mu/m stroke range for practical use. This system can also deliver high power output to move payload ranging from several gf to several tons. Moreover, this system has achieved state-of-the-art backlash free positioning by using the newly developed elastic displacement table and a newly developed giant magnetostriction actuator.