薄微结构介质电润湿驱动电压的降低

2018 14th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME) Pub Date : 2018-07-01 DOI:10.1109/PRIME.2018.8430346

Semih Turk, E. Verheyen, R. Viga, Sonja Allani, A. Jupe, H. Vogt

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引用次数: 1

摘要

本文分析了电介质电润湿液滴驱动的最小驱动电压$V_{\min}$。首先，介绍了电润湿的基本原理。在第二章中，通过原子层沉积(ALD)和微结构表面沉积电介质来展示对EWOD驱动电压的影响。最后，给出了COMSOL MultiphysicsOR的仿真结果来验证假设，并对结果进行了简短的讨论。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Decreasing the Actuation Voltage in Electrowetting on Dielectric With Thin and Micro-Structured Dielectric

This work presents the analysis of the minimum actuation voltage $V_{\min}$ for droplet actuation with electrowetting on dielectric (EWOD). First, the fundamentals of electrowetting are described. In the second chapter, the impact on the actuation voltage in EWOD is shown by a dielectric deposited with atomic layer deposition (ALD) and micro-structured surface. In the last part, results of a simulation with COMSOL MultiphysicsOR are presented to verify the hypothesis and a short discussion about the results is given.

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2018 14th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME)

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