V. Strunin, L. V. Baranova, A. A. Lyahov, V. Popov, G. J. Hudaybergenov, S. Jacob
{"title":"等离子体化学喷射法沉积非晶硅薄膜的光学性质","authors":"V. Strunin, L. V. Baranova, A. A. Lyahov, V. Popov, G. J. Hudaybergenov, S. Jacob","doi":"10.1109/EDM.2009.5173929","DOIUrl":null,"url":null,"abstract":"Plasma chemical jet method for deposition of amorphous silicon films is discussed. Optical properties of films are analyzed.","PeriodicalId":262499,"journal":{"name":"2009 International Conference and Seminar on Micro/Nanotechnologies and Electron Devices","volume":"15 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-07-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Optical properties of amorphous silicon thin films deposited by plasma chemical jet method\",\"authors\":\"V. Strunin, L. V. Baranova, A. A. Lyahov, V. Popov, G. J. Hudaybergenov, S. Jacob\",\"doi\":\"10.1109/EDM.2009.5173929\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Plasma chemical jet method for deposition of amorphous silicon films is discussed. Optical properties of films are analyzed.\",\"PeriodicalId\":262499,\"journal\":{\"name\":\"2009 International Conference and Seminar on Micro/Nanotechnologies and Electron Devices\",\"volume\":\"15 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2009-07-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2009 International Conference and Seminar on Micro/Nanotechnologies and Electron Devices\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/EDM.2009.5173929\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 International Conference and Seminar on Micro/Nanotechnologies and Electron Devices","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/EDM.2009.5173929","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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