扫描超声显微镜应用于微装配技术失效分析的新方法

L. Béchou, Y. Ousten, Y. Danto
{"title":"扫描超声显微镜应用于微装配技术失效分析的新方法","authors":"L. Béchou, Y. Ousten, Y. Danto","doi":"10.1109/IPFA.2001.941485","DOIUrl":null,"url":null,"abstract":"Scanning acoustic microscopy (SAM) is now a common detection method which produces high resolution images with focused ultrasonic waves ranging from 10 to 500 MHz. In this paper, first we propose improved methodologies in order to measure time-of-flight (TOF) with high accuracy and so localize defects in depth by digital signal processing used for the study of nonstationary signals as acoustic echoes. Secondly, we compare imaging mode capabilities associated with conventional acoustic focused probe propagation for SAM. Then, we apply these methods for localization of defects and failure analysis of ceramic capacitors, die-attach assembly and solder joint evaluation in a CBGA technology by C-SCAN analysis.","PeriodicalId":297053,"journal":{"name":"Proceedings of the 2001 8th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2001 (Cat. No.01TH8548)","volume":"19 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2001-07-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"9","resultStr":"{\"title\":\"New methods for scanning ultrasonic microscopy applications for failure analysis of microassembling technologies\",\"authors\":\"L. Béchou, Y. Ousten, Y. Danto\",\"doi\":\"10.1109/IPFA.2001.941485\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Scanning acoustic microscopy (SAM) is now a common detection method which produces high resolution images with focused ultrasonic waves ranging from 10 to 500 MHz. In this paper, first we propose improved methodologies in order to measure time-of-flight (TOF) with high accuracy and so localize defects in depth by digital signal processing used for the study of nonstationary signals as acoustic echoes. Secondly, we compare imaging mode capabilities associated with conventional acoustic focused probe propagation for SAM. Then, we apply these methods for localization of defects and failure analysis of ceramic capacitors, die-attach assembly and solder joint evaluation in a CBGA technology by C-SCAN analysis.\",\"PeriodicalId\":297053,\"journal\":{\"name\":\"Proceedings of the 2001 8th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2001 (Cat. No.01TH8548)\",\"volume\":\"19 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2001-07-09\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"9\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of the 2001 8th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2001 (Cat. No.01TH8548)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IPFA.2001.941485\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of the 2001 8th International Symposium on the Physical and Failure Analysis of Integrated Circuits. IPFA 2001 (Cat. No.01TH8548)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IPFA.2001.941485","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 9

摘要

扫描声学显微镜(SAM)现在是一种常用的检测方法,它可以产生高分辨率的图像,聚焦的超声波范围从10到500兆赫兹。在本文中,我们首先提出了改进的方法,以测量飞行时间(TOF)高精度,从而定位深度缺陷的数字信号处理用于研究非平稳信号,如声学回波。其次,我们比较了与传统声聚焦探头传播相关的SAM成像模式能力。然后,我们将这些方法应用于陶瓷电容器的缺陷定位和失效分析、模贴装组装和CBGA技术中焊点的C-SCAN分析。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
New methods for scanning ultrasonic microscopy applications for failure analysis of microassembling technologies
Scanning acoustic microscopy (SAM) is now a common detection method which produces high resolution images with focused ultrasonic waves ranging from 10 to 500 MHz. In this paper, first we propose improved methodologies in order to measure time-of-flight (TOF) with high accuracy and so localize defects in depth by digital signal processing used for the study of nonstationary signals as acoustic echoes. Secondly, we compare imaging mode capabilities associated with conventional acoustic focused probe propagation for SAM. Then, we apply these methods for localization of defects and failure analysis of ceramic capacitors, die-attach assembly and solder joint evaluation in a CBGA technology by C-SCAN analysis.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术官方微信