溶胶-凝胶法制备氧微传感器用TiO/sub /薄膜

1996 Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings Pub Date : 1996-12-08 DOI:10.1109/COMMAD.1996.610172

M. Atashbar, H. Sun, W. Wlodarski

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引用次数: 4

摘要

采用溶胶-凝胶法制备了多晶TiO/ sub2 /薄膜。通过扫描电子显微镜、x射线衍射和卢瑟福后向散射光谱对膜的形貌、晶相和化学成分进行了表征。对氧传感特性和灵敏度增强进行了研究和优化。评价了TiO/sub - 2/薄膜对浓度范围为10 ppm ~ 1%的氧气的气敏性。在270/spl℃到320/spl℃的工作温度下，灵敏度范围在5到8之间。

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TiO/sub 2/ thin films prepared by sol-gel method for oxygen microsensor application

Polycrystalline TiO/sub 2/ thin films have been prepared via a sol-gel method. The film morphology, crystalline phase and chemical composition have been characterized through scanning electron microscopy, X-ray diffraction, and Rutherford backscattering spectrometry. The oxygen sensing characteristics and sensitivity enhancement have been investigated and optimized. The gas sensitivity of TiO/sub 2/ thin films for the detection of oxygen in the concentration range 10 ppm to 1%, has been evaluated. A sensitivity range between 5 to 8 at working temperatures of 270/spl deg/C to 320/spl deg/C has been achieved.

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1996 Conference on Optoelectronic and Microelectronic Materials and Devices. Proceedings

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