抛光表面压电谐振器平面内模态振型的激光入射角优化

Proceedings of the 2005 IEEE International Frequency Control Symposium and Exposition, 2005. Pub Date : 2005-08-29 DOI:10.1109/FREQ.2005.1573920

Y. Watanabe, S. Goka, H. Sekimoto, T. Yamamoto

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引用次数: 0

摘要

基于抛光多层表面的光学反射模型，分析了激光束入射角对表面反射率和透射率的影响。分析表明，先前实验中使用的激光入射角是测量具有金和铬电极的抛光谐振器平面内模态的最佳选择。

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Laser-incident angle optimization for measuring in-plane mode shapes in piezoelectric resonators with polished surfaces

Based on an optical reflection model in polished multilayered surfaces, reflectance and transmittance for the incident angle of the laser beam have been analyzed. The analysis demonstrates that the laser incident angle used in the previous experiment is optimum for measuring in-plane mode shapes in polished resonators with gold and chrome electrodes.

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Proceedings of the 2005 IEEE International Frequency Control Symposium and Exposition, 2005.

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