用微干涉仪和触控轮廓仪测量微几何纳米标准的精度分析

Bulletin of the Military University of Technology Pub Date : 2018-12-31 DOI:10.5604/01.3001.0012.8503

Łukasz Ślusarski

{"title":"用微干涉仪和触控轮廓仪测量微几何纳米标准的精度分析","authors":"Łukasz Ślusarski","doi":"10.5604/01.3001.0012.8503","DOIUrl":null,"url":null,"abstract":"The goal of the work, described in this paper, was to examine and analyse measurement\ncapabilities of GUM Length and Angle Department in measurements of step height/depth standards\nwith the values below 1 μm (nanostandards), with 2D, and 3D surface characteristics. Measurements\nwere performed with microinterforometer and stylus profilometer.\nKeywords: nanometrology, depth/height standards, microinterferometry, contact profilometry.\n\n","PeriodicalId":232579,"journal":{"name":"Bulletin of the Military University of Technology","volume":"19 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-12-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Measurement accuracy analysis for microgeometry nanostandards with microinterferometer and stylus profilometer\",\"authors\":\"Łukasz Ślusarski\",\"doi\":\"10.5604/01.3001.0012.8503\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The goal of the work, described in this paper, was to examine and analyse measurement\\ncapabilities of GUM Length and Angle Department in measurements of step height/depth standards\\nwith the values below 1 μm (nanostandards), with 2D, and 3D surface characteristics. Measurements\\nwere performed with microinterforometer and stylus profilometer.\\nKeywords: nanometrology, depth/height standards, microinterferometry, contact profilometry.\\n\\n\",\"PeriodicalId\":232579,\"journal\":{\"name\":\"Bulletin of the Military University of Technology\",\"volume\":\"19 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-12-31\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Bulletin of the Military University of Technology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.5604/01.3001.0012.8503\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Bulletin of the Military University of Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.5604/01.3001.0012.8503","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

本文描述的工作目标是检查和分析GUM长度和角度部门在测量1 μm(纳米标准)以下的台阶高度/深度标准以及2D和3D表面特征方面的测量能力。采用微干涉仪和触针轮廓仪进行测量。关键词:纳米测量，深度/高度标准，微干涉测量，接触轮廓测量

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Measurement accuracy analysis for microgeometry nanostandards with microinterferometer and stylus profilometer

The goal of the work, described in this paper, was to examine and analyse measurement capabilities of GUM Length and Angle Department in measurements of step height/depth standards with the values below 1 μm (nanostandards), with 2D, and 3D surface characteristics. Measurements were performed with microinterforometer and stylus profilometer. Keywords: nanometrology, depth/height standards, microinterferometry, contact profilometry.

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Bulletin of the Military University of Technology

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