{"title":"电容式加速度计实验室采用聚合物薄膜快速成型技术","authors":"A. Gellineau, A. Rastegar, R. T. Howe","doi":"10.1109/IEDEC.2013.6526764","DOIUrl":null,"url":null,"abstract":"We present a rapid prototyping substitute for silicon MEMS Fabrication, which allows students to understand the fundamental tradeoffs in designing a planar accelerometer. The laboratory uses commercially available polymer-films and a CO2 laser cutter for device fabrication and design validation.","PeriodicalId":273456,"journal":{"name":"2013 3rd Interdisciplinary Engineering Design Education Conference","volume":"54 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-03-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Capacitive accelerometer laboratory using polymer-film rapid prototyping technology\",\"authors\":\"A. Gellineau, A. Rastegar, R. T. Howe\",\"doi\":\"10.1109/IEDEC.2013.6526764\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We present a rapid prototyping substitute for silicon MEMS Fabrication, which allows students to understand the fundamental tradeoffs in designing a planar accelerometer. The laboratory uses commercially available polymer-films and a CO2 laser cutter for device fabrication and design validation.\",\"PeriodicalId\":273456,\"journal\":{\"name\":\"2013 3rd Interdisciplinary Engineering Design Education Conference\",\"volume\":\"54 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-03-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2013 3rd Interdisciplinary Engineering Design Education Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IEDEC.2013.6526764\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 3rd Interdisciplinary Engineering Design Education Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IEDEC.2013.6526764","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Capacitive accelerometer laboratory using polymer-film rapid prototyping technology
We present a rapid prototyping substitute for silicon MEMS Fabrication, which allows students to understand the fundamental tradeoffs in designing a planar accelerometer. The laboratory uses commercially available polymer-films and a CO2 laser cutter for device fabrication and design validation.
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