紧致力矩对BTS晶体高温压电振动传感器性能的影响

Xue-liang Liu, Chao Jiang, Shi-wei Tian, H. Fang, F. Yu, Xian Zhao
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引用次数: 0

摘要

压电振动传感器中敏感元件与电极之间的接触刚度是其基本参数之一,它直接影响到振动传感器的特征频率和动态性能。由于接触刚度通常被忽略,在传感器的设计和制造中几乎没有规则。为了解决这一问题,设计、组装并测试了一种以BTS单晶为材料的压缩型压电振动传感器,用于高温振动传感。首先建立了振动传感器的刚度模型,然后进行了BTS单晶片的制备、传感器的组装和实验装置的建立。采用激光焊接的全封装传感器在120Hz ~ 620Hz的频率范围内,温度范围为室温~ 650℃。结果表明,基于BTS的压电振动传感器在500℃下保持相同的灵敏度,停留时间为72h,具有较高的稳定性和可靠性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Influence of Tighting Torque on the Performance of High Temperature Piezoelectric Vibration Sensor Using BTS Crystal
Contact stiffness between sensitive elements and electrodes in piezoelectric vibration sensor is one of the basic parameters, which has a direct influence on the characteristic frequency and dynamic performance of the vibration sensors. Since the contact stiffness has been generally neglected, there are few rules in designing and fabricating sensors. In order to solve this problem, a compression-mode piezoelectric vibration sensor using Ba2TiSi2O8 (BTS) single crystals was designed, assembled and tested for high temperature vibration sensing. Stiffness model of the vibration sensor was presented first, followed by BTS single crystal plates preparation, sensor assembly and experimental setup establishment. The fully packaged sensor by laser welding was characterized at temperatures ranged from room temperature to 650 °C under frequency range of 120Hz to 620Hz. Results indicated that the BTS based piezoelectric vibration sensors retained the same sensitivity at 500 °C for a dwell time of 72h, exhibiting a high stability and reliability.
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