光栅光调制器表面弯曲的分析与实验

2009 16th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits Pub Date : 2009-07-06 DOI:10.1109/IPFA.2009.5232639

Lin Shi, Yingjin Pan, Zhihai Zhang, Jie Zhang, Weiwei, Wei Wang

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引用次数: 0

摘要

讨论了表面弯曲对二维光栅光调制器衍射特性的影响。在实验数据的基础上，考虑了曲面弯曲的情况，建立了相应的模型，计算了不同弯曲程度对调制结果的影响，并通过实验进行了验证。

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Analysis and experiment of surface bending to grating light modulator

The effects of diffraction characteristics that the surface bending to two dimension grating light modulators is discussed in this paper. With consideration of surface bending, a corresponding model is built based on experimental data, and then the effects of different bending to the modulation results have been calculated which is testified by experiments.

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2009 16th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits

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