提高热载流子可靠性的非对称栅极堆无结双材料围绕栅极MOSFET的解析建模

A. Basak, A. Sarkar
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引用次数: 0

摘要

为了提高热载流子可靠性,本文提出了非对称栅堆无结双材料环栅(AGSJLDMSG) MOSFET的解析建模方法。这种创新的结构集中在非对称栅堆设计上,在源侧和漏侧结合了两种不同的高K介电体,从而显著降低了电场和漏极诱导垒降低(DIBL)。对这种创新结构和各种早期结构之间的短通道效应进行了比较评估。表面电位、电场、DIBL、阈下斜率、阈下漏极电流(Id)和跨导(gm)都作为优值图(FOM)指标进行了检测。结果表明,漏极侧的高K介电介质增加了对热载流子产生的损伤的抗扰度和模拟/射频性能。利用ATLAS设备模拟器进行仿真。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Analytical Modeling of Asymmetric Gate Stack Junctionless Dual Material Surrounding Gate MOSFET for Enhanced Hot Carrier Reliability
The analytical modelling of asymmetric gate stack junctionless dual material surrounding gate (AGSJLDMSG) MOSFET was suggested in this article to enhance hot carrier reliability. The innovative construction is focused on an asymmetric gate stack design that combines two distinct high K dielectrics at the source and drain sides, which dramatically decreases electric field and drain induced barrier lowering (DIBL). A comparative evaluation of short channel effects (SCEs) among this innovative structure and various earlier architectures was performed. Surface potential, electric field, DIBL, subthreshold slop, subthreshold drain current (Id), and transconductance (gm) have all been examined as figure of merit (FOM) measures. The results show that the high K dielectric on the drain side increases immunity to hot carrier generated damage and the analog/RF properties. The ATLAS device simulator was used to run the simulations.
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