{"title":"使用DBD等离子体处理PDMS表面并改善附着力","authors":"F. do Nascimento, S. Moshkalev, M. Machida","doi":"10.1109/SBMICRO.2016.7731360","DOIUrl":null,"url":null,"abstract":"In this work we used an atmospheric pressure dielectric barrier discharge plasma to perform treatments of poly(dimethylsiloxane) (PDMS) surfaces in order to improve the adhesion between the samples. The results show that different conditions of plasma treatment can lead to a better adhesion between the PDMS surfaces. If the power delivered to the plasma is increased, the adhesion is better, but the best results are obtained if the vibrational temperature of the nitrogen molecules in the plasma is increased.","PeriodicalId":113603,"journal":{"name":"2016 31st Symposium on Microelectronics Technology and Devices (SBMicro)","volume":"19 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"The use of DBD plasmas for treatment of PDMS surfaces and adhesion improvement\",\"authors\":\"F. do Nascimento, S. Moshkalev, M. Machida\",\"doi\":\"10.1109/SBMICRO.2016.7731360\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this work we used an atmospheric pressure dielectric barrier discharge plasma to perform treatments of poly(dimethylsiloxane) (PDMS) surfaces in order to improve the adhesion between the samples. The results show that different conditions of plasma treatment can lead to a better adhesion between the PDMS surfaces. If the power delivered to the plasma is increased, the adhesion is better, but the best results are obtained if the vibrational temperature of the nitrogen molecules in the plasma is increased.\",\"PeriodicalId\":113603,\"journal\":{\"name\":\"2016 31st Symposium on Microelectronics Technology and Devices (SBMicro)\",\"volume\":\"19 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2016-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2016 31st Symposium on Microelectronics Technology and Devices (SBMicro)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SBMICRO.2016.7731360\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 31st Symposium on Microelectronics Technology and Devices (SBMicro)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SBMICRO.2016.7731360","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
The use of DBD plasmas for treatment of PDMS surfaces and adhesion improvement
In this work we used an atmospheric pressure dielectric barrier discharge plasma to perform treatments of poly(dimethylsiloxane) (PDMS) surfaces in order to improve the adhesion between the samples. The results show that different conditions of plasma treatment can lead to a better adhesion between the PDMS surfaces. If the power delivered to the plasma is increased, the adhesion is better, but the best results are obtained if the vibrational temperature of the nitrogen molecules in the plasma is increased.
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