电解质绝缘体半导体场效应晶体管

C. Fung, P. Cheung, W. Ko
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引用次数: 8

摘要

结合IGFET理论,建立了栅极绝缘体表面羟基的表面电离和络合模型,得到了电解质-绝缘体-半导体场效应晶体管(EISFET)在电解质参数变化下的终端行为。在pH值为2 ~ 9的条件下,用热生长二氧化硅在含Na+、K+和Li+离子的简单电解液中制备EISFET的实验结果与理论基本一致。该模型成功地解释了EISFET作为pH传感器的pH敏感性和离子干扰效应。从该模型中可以得出,表面位置密度、NS和表面电离常数的分离(ΔpK)是EISFET作为pH传感器的主要控制因素。为了获得高灵敏度和良好的选择性,需要较大的NS和较小的ΔpK值。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Electrolyte-insulator-semiconductor field-effect transistor
A model adapting the surface ionization and complexation of the surface hydroxyl groups on the gate insulator surface in conjunction with the IGFET theory is proposed to arrive at the terminal behavior of the electrolyte-insulator-semiconductor field-effect transistor (EISFET) in response to the variation of electrolyte parameters. Experimental results of EISFET employing thermally grown silicon dioxide in simple electrolytes containing Na+, K+and Li+ions titrated in a pH range from 2 to 9 were found to be in good agreement with the theory. The model successfully explains the pH sensitivity as well as the ion interference effect of the EISFET as a pH sensor. From this model, it is concluded that the surface site density, NS, and the separation of surface ionization constants, in terms of ΔpK, are the main controlling factors for the EISFET as a pH sensor. For high sensitivity and good selectivity, large NS and small ΔpK values are required.
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