一种微机电系统可变光衰减器

2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399) Pub Date : 2000-08-21 DOI:10.1109/OMEMS.2000.879656

R. Wood, V. Dhuler, E. Hill

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引用次数: 17

摘要

对更小、更强的衰减器的需求促使MEMS技术的应用产生了一种适用于光通信环境的紧凑可变光衰减器。在本文中，我们描述了一种硅- mems器件，该器件采用简单的热致动器将金/硅衰减叶片可变地移动到光路中。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A MEMS variable optical attenuator

The need for smaller and more capable attenuators has motivated the application of MEMS technology to produce a compact variable optical attenuator suitable for optical telecommunications environments. In this paper we describe a silicon-MEMS device that employs a simple thermal actuator to variably move a gold/silicon attenuation vane into the optical path.

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来源期刊

2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)

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