用于光学传感器的高通量、大规模、宽带等离子体纳米结构制造

NAECON 2014 - IEEE National Aerospace and Electronics Conference Pub Date : 2014-06-24 DOI:10.1109/NAECON.2014.7045769

J. Vella, J. Goldsmith, N. Limberopoulos, J. Derov, A. Drehman

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引用次数: 1

摘要

等离子体具有提高探测器性能的潜力。开发了一种易于规模化生产的金属热脱湿工艺。通过这个过程，等离子体纳米结构被制造出来，提供了在1000纳米波长范围内可调谐的宽带等离子体共振。等离子体介质及其集成到基于荧光的传感器将被描述。

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High throughput, large scale, broadband, plasmonic nanostructure fabrication for optical sensors

Plasmonics have the potential to enhance the performance of detectors. A thermal metal dewetting process was developed which can be easily scaled for high throughput production. Through this process, plasmonic nanostructures were fabricated providing broadband plasmon resonance tunable over a 1000 nm wavelength range. The plasmonic media and their integration into fluorescence-based sensors will be described.

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NAECON 2014 - IEEE National Aerospace and Electronics Conference

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