{"title":"砷化铟在HNO3-HBr-H2O和Br2-HBr溶液中的溶解","authors":"Z. F. Tomashik, S. Danylenko, V. Tomashik","doi":"10.1117/12.368403","DOIUrl":null,"url":null,"abstract":"The InAs dissolution in HNO3-HBr-H2O and Br2-HBr solutions is investigated. The surface of equal etching rates is constructed and the process limiting stages of dissolution depending on a size of a ratio in such solutions are determined. The kinetics of InAs dissolution in Br2- HBr solutions is investigated. The solution region which can be used for chemicodynamic polishing of InAs is determined.","PeriodicalId":276773,"journal":{"name":"Material Science and Material Properties for Infrared Optics","volume":"15 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-11-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Dissolution of indium arsenide in HNO3-HBr-H2O and Br2-HBr solutions\",\"authors\":\"Z. F. Tomashik, S. Danylenko, V. Tomashik\",\"doi\":\"10.1117/12.368403\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The InAs dissolution in HNO3-HBr-H2O and Br2-HBr solutions is investigated. The surface of equal etching rates is constructed and the process limiting stages of dissolution depending on a size of a ratio in such solutions are determined. The kinetics of InAs dissolution in Br2- HBr solutions is investigated. The solution region which can be used for chemicodynamic polishing of InAs is determined.\",\"PeriodicalId\":276773,\"journal\":{\"name\":\"Material Science and Material Properties for Infrared Optics\",\"volume\":\"15 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1999-11-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Material Science and Material Properties for Infrared Optics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.368403\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Material Science and Material Properties for Infrared Optics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.368403","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Dissolution of indium arsenide in HNO3-HBr-H2O and Br2-HBr solutions
The InAs dissolution in HNO3-HBr-H2O and Br2-HBr solutions is investigated. The surface of equal etching rates is constructed and the process limiting stages of dissolution depending on a size of a ratio in such solutions are determined. The kinetics of InAs dissolution in Br2- HBr solutions is investigated. The solution region which can be used for chemicodynamic polishing of InAs is determined.
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