ZnO纳米棒对SAW质量传感器灵敏度的影响

2017 IEEE 37th International Conference on Electronics and Nanotechnology (ELNANO) Pub Date : 2017-04-01 DOI:10.1109/ELNANO.2017.7939725

V. Ulianova, Vladyslav Selotkin, A. Zazerin, A. Orlov, Y. Yakimenko, O. Bogdan

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引用次数: 0

摘要

本文分析了ZnO纳米棒参数对铌酸锂衬底表面声波(SAW)质量传感器灵敏度的影响。采用有限元法建立了ZnO纳米棒增强SAW质量敏感传感器的模型。计算了SAW传感器谐振频率与铌酸锂和铌酸锂纳米棒质量载荷的关系。采用氧化锌纳米棒作为传感元件，使传感器的灵敏度提高了约4倍。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Influence of ZnO nanorods on sensitivity of SAW mass sensor

The article contains the analysis of the influence of ZnO nanorods parameters on sensitivity of surface acoustic wave (SAW) mass sensors on the lithium niobate substrate. The model of SAW mass-sensitive sensor enhanced with ZnO nanorods was built by the finite element method. The dependences of the resonant frequency of the SAW sensor on the mass loading on the lithium niobate and lithium niobate with ZnO nanorods were calculated. Applying of ZnO nanorods as sensing element allowed increasing of sensor sensitivity in about 4 times.

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2017 IEEE 37th International Conference on Electronics and Nanotechnology (ELNANO)

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