组成均匀的In/sub x/Ga/sub 1-x/As块状晶体的生长和表征又向前迈进了一步

P. Verma, M.R. Islam, M. Yamada, Y. Hanaue, K. Kinoshita, M. Tatsumi
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引用次数: 0

摘要

可调谐晶格匹配的可能性使得大块In/sub x/Ga/sub 1-x/As晶体成为基于ingaas的光通信器件的优秀衬底材料。然而,由于重力在熔体中引起对流,使用常规生长技术很难在地面上生长出成分均匀的in /sub x/Ga/sub 1-x/As单晶。针对传统生长方法的不足,我们开发了一种新的生长技术,称为行液区生长法,可用于在微重力条件下在空间中生长组成均匀的In/sub x/Ga/sub 1-x/ as单晶。这种新技术对起始材料和生长温度曲线有一定的要求,已在地面上进行了一些初步的生长。由于不可避免地要对其成分进行精确的评价,因此对起始材料和初步生长的晶体进行了非破坏性的表征。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A step forward to the growth and characterization of compositionally homogeneous In/sub x/Ga/sub 1-x/As bulk crystal
A possibility of tunable lattice matching makes bulk In/sub x/Ga/sub 1-x/As crystal an excellent substrate material for InGaAs-based optical communication devices. However, due to convection in the melt caused by the gravity, it is very difficult to grow a compositionally homogeneous In/sub x/Ga/sub 1-x/As single crystal on ground using the conventional growth techniques. Considering the shortcomings of the conventional growth methods, we have developed a novel growth technique, named as the traveling liquidus-zone method, which can be used to grow compositionally homogeneous In/sub x/Ga/sub 1-x/As single crystals in space, under the micro-gravity conditions. This new technique, which has some specific requirements about the starting material and the growth temperature profile, has been used on ground to carry out some preliminary growths. Since a precise evaluation of compositional profile is inevitable, the starting materials as well as the preliminarily grown crystals have been non-destructively characterized.
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