热载流子降解的紧凑物理分析模型

S. Tyaginov, A. Grill, M. Vandemaele, T. Grasser, G. Hellings, A. Makarov, M. Jech, D. Linten, B. Kaczer
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引用次数: 11

摘要

基于对这种可靠性现象背后的物理图景的全面描述,我们开发并验证了热载流子退化的完全分析模型。该方法捕获并连接载流子输运,Si-H键断裂机制的建模,以及退化器件的模拟。模型内评估的所有量都由解析表达式描述,因此避免了耗时的TCAD模拟。我们表明,该模型可以很准确地捕捉到归一化线性漏极电流变化对应力时间的依赖关系。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A Compact Physics Analytical Model for Hot-Carrier Degradation
We develop and validate a fully analytical model for hot-carrier degradation based on a thorough description of the physical picture behind this reliability phenomenon. This approach captures and links carrier transport, modeling of the Si-H bond-breakage mechanisms, and simulations of the degraded devices. All quantities evaluated within the model are described by analytical expressions and time consuming TCAD simulations are therefore avoided. We show that the model can capture measured dependencies of the normalized linear drain current change on stress time with good accuracy.
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