碳纳米纤维互连中的电极和衬底接触

2009 IEEE International Interconnect Technology Conference Pub Date : 2009-06-01 DOI:10.1109/IITC.2009.5090360

Tsutomu Saito, H. Yabutani, Toshishige Yamada, P. Wilhite, Cary Y. Yang

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引用次数: 0

摘要

为了研究大电流应力下碳纳米纤维(CNF)互连的可靠性，考虑了CNF电极界面之间和电极之间的电和热传递。在本研究中，研究了三种不同类型的触点:(a) CNF-Au电极，(b) CNF-SiO2衬底和(c)沉积钨的CNF-Au电极。我们已经确定，接触(c)改善了系统的整体电和热传输特性。

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Electrode and substrate contacts in carbon nanofiber interconnects

To study the reliability of carbon nanofiber (CNF) interconnect under high-current stress, electrical and thermal transports across CNF-electrode interfaces and between electrodes are considered. For this investigation, three different types of contacts are examined: (a) CNF-Au electrode, (b) CNF-SiO2 substrate, and (c) tungsten-deposited CNF-Au electrode. We have determined that contact (c) improves the overall electrical and thermal transport characteristics of the system.

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2009 IEEE International Interconnect Technology Conference

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