溶胶-凝胶法制备纳米掺铝zno基CH4传感器的灵敏度

2014 2nd International Conference on Electrical, Electronics and System Engineering (ICEESE) Pub Date : 1900-01-01 DOI:10.1109/ICEESE.2014.7154614

A. Shafura, N. Sin, N. Azhar, M. Uzer, M. H. Mamat, S. Alrokayan, H. Khan, M. Rusop

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引用次数: 2

摘要

研究了不同厚度铝掺杂氧化锌纳米薄膜的原子力显微镜(AFM)形貌和电学性能。采用溶胶-凝胶自旋涂覆法制备了zno基传感器薄膜。研究了室温下暴露于甲烷(CH4)气体时的灵敏度。结果表明:制备厚度为170 nm的ZnO纳米结构的电阻率最低，为0.752 × 106 Ω-cm;它还显示最高灵敏度值为30%。

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Sensitivity of nanostructured Al-doped ZnO-based CH4 sensor fabricated using sol-gel method

The atomic force microscopy (AFM) morphologies and electrical properties of the nanostructured Aluminium (Al) doped Zinc Oxide (ZnO) thin films prepared at various thicknesses were investigated. The films were prepared by sol-gel spin-coating method to fabricate ZnO-based sensors. The sensitivity upon exposure to methane (CH4) gas at room temperature was investigated. The results show that the lowest resistivity of 0.752 × 106 Ω-cm was obtained for the ZnO nanostructures prepared at thickness of 170 nm. It also display highest sensitivity value which is 30%.

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2014 2nd International Conference on Electrical, Electronics and System Engineering (ICEESE)

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