P. Ivanov, F. Blanco, I. Gràcia, N. Sabaté, A. Ruiz, X. Vilanova, X. Correig, L. Fonseca, E. Figueras, J. Santander, C. Cané
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Silicon μ-preconcentrator for improved gas detection
In this study we present a μ-preconcentrator unit fabricated with silicon technology. The unit consists of a 3D-microheater surrounded by an insulating membrane. The preconcentrator is made up of a grid of suspended silicon bars underneath a polysilicon resistor. The grid was formed by 40 μm-wide, 520 μm-depth, 3000 μm-long silicon bars fabricated by deep reactive ion etching covering a 3 x 3 mm2 area. This type of silicon grid structure allows holding large amount of absorbent materials and provides efficient heat diffusion.
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