沟道掺杂对无结场效应晶体管的影响

B. S. Lim, M. Arshad, N. Othman, M. Fathil, M. F. Fatin, U. Hashim
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引用次数: 8

摘要

本文通过2D-TCAD Sentaurus仿真工具,提出了一种简单的方法来研究沟道掺杂对25 nm栅极长度的无结晶体管工作的影响。我们将通道掺杂提高到掺杂源和漏极的水平,从而产生源和漏极之间的无结现象。提取了晶体管的阈值电压、跨导、亚阈值斜率、漏极势垒降低等参数。还考虑了低漏极和高漏极电压的影响。掺杂浓度越高,产生的漏极电流越大,但缺点是由于通道越宽而无法完全耗尽,也会产生较大的亚阈值斜率。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
The impact of channel doping in junctionless field effect transistor
In this paper, we present the simple approach in study the impact of channel doping on the operation of the junctionless transistor transistor in 25 nm gate lengths through 2D-TCAD Sentaurus simulation tools. We increase the channel doping up to the level of doping source and drain, thus creating the junctionless phenomena between source and drain. The transistor parameters such as threshold voltage, transconductance, subthreshold slope, drain-induced barrier lowering are extracted. The impacts of low and high drain voltages are also considered. The higher the doping concentration the larger drain current can be produced, however the drawback is larger subthreshold slope is also obtained due to wider channel preventing fully-depletion.
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