{"title":"用微处理器控制器件定时的电压对比扫描电镜观察","authors":"J. Bindell, J. McGinn","doi":"10.1109/IRPS.1980.362912","DOIUrl":null,"url":null,"abstract":"A voltage contrast technique which generates a video display of data movement within an active integrated circuit has been developed. The technique utilizes a microprocessor to exercise and control the flow of data within an integrated circuit so that SEM images of sequential logic states can be generated without the use of electron beam blanking.","PeriodicalId":270567,"journal":{"name":"18th International Reliability Physics Symposium","volume":"458 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1980-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Voltage Contrast SEM Observations with Microprocessor Controlled Device Timing\",\"authors\":\"J. Bindell, J. McGinn\",\"doi\":\"10.1109/IRPS.1980.362912\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A voltage contrast technique which generates a video display of data movement within an active integrated circuit has been developed. The technique utilizes a microprocessor to exercise and control the flow of data within an integrated circuit so that SEM images of sequential logic states can be generated without the use of electron beam blanking.\",\"PeriodicalId\":270567,\"journal\":{\"name\":\"18th International Reliability Physics Symposium\",\"volume\":\"458 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1980-04-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"18th International Reliability Physics Symposium\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IRPS.1980.362912\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"18th International Reliability Physics Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IRPS.1980.362912","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Voltage Contrast SEM Observations with Microprocessor Controlled Device Timing
A voltage contrast technique which generates a video display of data movement within an active integrated circuit has been developed. The technique utilizes a microprocessor to exercise and control the flow of data within an integrated circuit so that SEM images of sequential logic states can be generated without the use of electron beam blanking.
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