氮化镓基紫外光电探测器中光电流的等离子体增强

A. Shetty, Kamal John Sundar, B. Roul, S. Mukundan, G. Chandan, L. Mohan, Ambarish Ghosh, K. Vinoy, S. .. Krupanidhi
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引用次数: 7

摘要

利用分子束外延技术在蓝宝石衬底上生长了200 nm厚的氮化镓薄膜。采用热蒸发和退火法制备了金纳米颗粒。采用纳米球光刻技术在另一组薄膜上制备了铝纳米结构。采用标准光刻技术制备了交错电极,形成了金属-半导体-金属光电探测器。比较了裸露的氮化镓薄膜与金纳米粒子和铝纳米结构样品的性能。在这两种情况下,光电流的增强与暗电流的变化可以忽略不计。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Plasmonic enhancement of photocurrent in GaN based UV photodetectors
200 nm thick films of gallium nitride were grown on sapphire substrate using molecular beam epitaxy. Gold nanoparticles were fabricated on the grown films by thermal evaporation followed by annealing. Aluminium nanostructures were fabricated on another set of films using nanosphere lithography. Interdigited electrodes were fabricated using standard lithography to form metal-semiconductor-metal photodetectors. The performance of bare gallium nitride films were compared with the samples that had Au nanoparticles and Al nanostructures. An enhancement of the photocurrent with negligible change in dark current was observed in both cases.
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