Small delay testing for TSVs in 3-D ICs

In this work, we present a robust small delay test scheme for through-silicon vias (TSVs) in a 3D IC. By changing the output inverter's threshold of a TSV in a testable oscillation ring structure, we can approximate the propagation delay across that TSV, and thereby detecting a small delay fault. SPICE simulation reveals that this Variable Output Thresholding (VOT) technique is still effective even when there is significant process variation in detecting a slow TSV with some resistive open defect that may escape the traditional at-speed test.