Eun Sub Shim, Jaehong Park, W. Choi, Youngmin Kim, Y. Kwon, Jong Seon No, S. Nam, Donghee Cho
{"title":"非接触式MEMS开关热开关测试","authors":"Eun Sub Shim, Jaehong Park, W. Choi, Youngmin Kim, Y. Kwon, Jong Seon No, S. Nam, Donghee Cho","doi":"10.1109/MWSYM.2007.380100","DOIUrl":null,"url":null,"abstract":"This paper presents the performance and power handling properties of a capacitive MEMS switch. The switch is a completely non-contact-type switch built with several capacitors that contain air gaps, and free from contact failures that frequently occur in contact-type switches. The switch was designed for 24 GHz automotive radar applications, and the average RF performance of the fabricated switches includes insertion loss of 0.5 dB and isolation of 20 dB at 24 GHz. The lifetime, power-handling properties, and linearity are examined in a hot-switching mode. After 109 continuous cycles in a hot-switching mode with 18 mW RF input power, mechanical failures or RF performance degradation were not detected. Power handling capacity of 0.9 W under hot-switching condition was achieved.","PeriodicalId":213749,"journal":{"name":"2007 IEEE/MTT-S International Microwave Symposium","volume":"42 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2007-06-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Hot-Switching Test of Non-Contact Type MEMS Switch\",\"authors\":\"Eun Sub Shim, Jaehong Park, W. Choi, Youngmin Kim, Y. Kwon, Jong Seon No, S. Nam, Donghee Cho\",\"doi\":\"10.1109/MWSYM.2007.380100\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents the performance and power handling properties of a capacitive MEMS switch. The switch is a completely non-contact-type switch built with several capacitors that contain air gaps, and free from contact failures that frequently occur in contact-type switches. The switch was designed for 24 GHz automotive radar applications, and the average RF performance of the fabricated switches includes insertion loss of 0.5 dB and isolation of 20 dB at 24 GHz. The lifetime, power-handling properties, and linearity are examined in a hot-switching mode. After 109 continuous cycles in a hot-switching mode with 18 mW RF input power, mechanical failures or RF performance degradation were not detected. Power handling capacity of 0.9 W under hot-switching condition was achieved.\",\"PeriodicalId\":213749,\"journal\":{\"name\":\"2007 IEEE/MTT-S International Microwave Symposium\",\"volume\":\"42 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2007-06-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2007 IEEE/MTT-S International Microwave Symposium\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MWSYM.2007.380100\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 IEEE/MTT-S International Microwave Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MWSYM.2007.380100","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Hot-Switching Test of Non-Contact Type MEMS Switch
This paper presents the performance and power handling properties of a capacitive MEMS switch. The switch is a completely non-contact-type switch built with several capacitors that contain air gaps, and free from contact failures that frequently occur in contact-type switches. The switch was designed for 24 GHz automotive radar applications, and the average RF performance of the fabricated switches includes insertion loss of 0.5 dB and isolation of 20 dB at 24 GHz. The lifetime, power-handling properties, and linearity are examined in a hot-switching mode. After 109 continuous cycles in a hot-switching mode with 18 mW RF input power, mechanical failures or RF performance degradation were not detected. Power handling capacity of 0.9 W under hot-switching condition was achieved.
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