ISM波段片上方形螺旋天线的设计与制作

International Conference on Instrumentation, Communication, Information Technology, and Biomedical Engineering 2009 Pub Date : 2009-11-01 DOI:10.1109/ICICI-BME.2009.5417280

M. Ramezani, H. Miladi, M. Shahabadi, S. Mohajerzadeh, A. Tamaddon

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引用次数: 0

摘要

报道了一种用于科学和医疗(ISM)频段的24ghz螺旋天线。该程序与标准CMOS制造工艺完全兼容。利用微加工技术在硅衬底上实现了制造。为了提高辐射效率和减小传输损耗，硅基薄膜被应用于硅衬底。为了优化天线的占用面积，选择了方形螺旋结构而不是圆形螺旋结构。仿真结果表明，螺旋天线具有良好的匹配性和宽频带工作性能。

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Design and fabrication of on-chip square spiral antenna for ISM band

A spiral antenna operating at 24 GHz designed for scientific and medical (ISM) band is reported. The procedure is fully compatible with standard CMOS fabrication process. The fabrication has been achieved on silicon substrates using a bulk micromachining technique. To improve the radiation efficiency and to minimize transmission loss, a silicon-based membrane has been employed on silicon substrates. To optimize the occupied area of the antenna a square spiral structure is selected rather than the circular one. The simulation results show a good matching and wide bandwidth operation of the spiral antenna.

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来源期刊

International Conference on Instrumentation, Communication, Information Technology, and Biomedical Engineering 2009

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