用于微执行器的气体润滑微轴承

TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers Pub Date : 1991-06-24 DOI:10.1109/SENSOR.1991.149030

J. Huang, Q. Tong, P.-S. Mao

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引用次数: 2

摘要

讨论了气体润滑轴承的优点和缩小尺寸。考虑了分子平均自由程对轴承的影响。采用集成电路制造工艺，设计和制造了气动螺旋槽微轴承和外压微轴承。它们已用于转子直径为60 μ m和轮毂直径为20 μ m的微电机中。

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Gas-lubricated micro-bearings for microactuators

The advantages and scale-down of gas lubricated bearings are discussed. The effect of molecular mean free path on the bearing is considered. An aerodynamic spiral grooved microbearing and an externally pressurized microbearing have been designed and fabricated by processes derived from the IC fabrication process. They have been used in micromotors with a rotor diameter of 60 mu m and a hub diameter of 20 mu m.<>

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TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers

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