{"title":"MEMS可变形镜面形状的精确开环控制","authors":"T. Bifano, J. Stewart, A. Diouf","doi":"10.1117/12.769492","DOIUrl":null,"url":null,"abstract":"A new method is introduced for predicting control voltages that will generate a prescribed surface shape on a deformable mirror. The algorithm is based upon an analytical elastic model of the mirror membrane and an empirical electromechanical model of its actuators. It is computationally simple and inherently fast. Shapes at the limit of achievable mirror spatial frequencies with up to 1.5μm amplitudes have been achieved with less than 15nm RMS error.","PeriodicalId":130723,"journal":{"name":"SPIE MOEMS-MEMS","volume":"65 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-02-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Precise open-loop control of MEMS deformable mirror shape\",\"authors\":\"T. Bifano, J. Stewart, A. Diouf\",\"doi\":\"10.1117/12.769492\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A new method is introduced for predicting control voltages that will generate a prescribed surface shape on a deformable mirror. The algorithm is based upon an analytical elastic model of the mirror membrane and an empirical electromechanical model of its actuators. It is computationally simple and inherently fast. Shapes at the limit of achievable mirror spatial frequencies with up to 1.5μm amplitudes have been achieved with less than 15nm RMS error.\",\"PeriodicalId\":130723,\"journal\":{\"name\":\"SPIE MOEMS-MEMS\",\"volume\":\"65 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2008-02-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"SPIE MOEMS-MEMS\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.769492\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"SPIE MOEMS-MEMS","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.769492","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Precise open-loop control of MEMS deformable mirror shape
A new method is introduced for predicting control voltages that will generate a prescribed surface shape on a deformable mirror. The algorithm is based upon an analytical elastic model of the mirror membrane and an empirical electromechanical model of its actuators. It is computationally simple and inherently fast. Shapes at the limit of achievable mirror spatial frequencies with up to 1.5μm amplitudes have been achieved with less than 15nm RMS error.
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