嵌入式微晶圆级封装用DAF胶带的特性研究

S. L. Pei-Siang, G. Sharma, Aditya Kumar, V. S. Rao, V. Sheng
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引用次数: 1

摘要

对更小、更薄、更轻电子产品的新封装技术的要求导致电子工业向晶圆级封装发展。晶圆级封装的一些主要优点是适合非常细的间距互连,低组装成本和更小的外形。这是因为通过晶圆级技术形成的封装与芯片本身具有相同的尺寸。晶圆级封装尤其适用于便携式产品,如手机和数码相机。当晶圆薄至100 μ m时,传统的贴模工艺可能不适合,因为控制贴模膏的流出变得至关重要。新一代的贴模材料如dicding die attach film (DDAF)被引入,以控制贴模边缘的浆料溢出,并具有一致的粘接线厚度。本文介绍了DDAF胶带在100µm薄片上的覆膜结果,DDAF胶带的覆膜工艺表征和材料表征,通过2条DDAF胶带在贴模工艺和3级湿敏试验后的模剪试验。采用三因素D.O.E(键合压力、键合温度和键合时间)来了解影响DDAF带键合过程的主要因素,以及键合参数对DDAF键合线厚度和DDAF空隙的影响(表1)。选择的3种键合力范围为0.5kg ~ 2.5kg。DDAF组件的可靠性也将在本工作中进行研究和报告。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Characterization of DAF tape for embedded micro wafer level packaging
The requirements of new packaging technologies for smaller, thinner and lighter electronics products have resulted in electronics industry moving towards wafer level packaging. Some of the main advantages of wafer level packaging are suitability for very fine pitch interconnection, low assembly cost and smaller form factor. This is because the package formed through wafer level technology has the same size as the die itself. Wafer level packaging is in demand especially for portable products such as mobile phone and digital camera. With wafers thinned to 100µm, conventional die attach process may not be suitable as the control of bleed out of the die attached paste becomes critical. New generation of die attach material such as the Dicing Die attach film (DDAF) is introduced to control the paste bleed at the die edge as well as to have a consistent bondline thickness. This paper presents the results of DDAF tape lamination on 100µm thin wafer, DDAF tape dicing process characterization and materials characterization in terms of die shear test of 2 DDAF tapes after die attach process and after subjecting to Moisture Sensitivity test Level 3. A three-factor D.O.E (bonding pressure, bonding temperature and bonding time) adopted to understand the dominant contributing factors on DDAF tape bonding process and to understand the effects of bonding parameters on the DDAF bondline thickness and DDAF voids (Table 1). The 3 selected bond forces range from 0.5kg to 2.5kg. Reliability of the DDAF assembly will also be studied and reported in this work.
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