纳米压头作为纳米光刻工具的应用

2011 International Students and Young Scientists Workshop "Photonics and Microsystems" Pub Date : 2011-07-08 DOI:10.1109/STYSW.2011.6155847

M. Ramiączek-Krasowska, A. Szyszka, R. Paszkiewicz, J. Lukes

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引用次数: 0

摘要

本文介绍了用纳米压头在抗蚀剂上刻划金金属层的结果。本文还介绍了纳米刮擦作为纳米工具的特性。指出了纳米压头作为纳米刻蚀系统在应用中存在的问题。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Application nanoindenter as nanolithography tool

In the paper the results of nanoscratching of gold metal layer deposited on resist made with application of a nanoindenter are presented. Also in the paper the properties of nanoscratching as nanotool are presented. The authors showed what problems exists in application of nanoindenters as systems used for nanoscratching lithography.

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2011 International Students and Young Scientists Workshop "Photonics and Microsystems"

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