Shin Sakai, Y. Tashiro, N. Akahane, R. Kuroda, K. Mizobuchi, S. Sugawa
{"title":"一种采用横向溢流门的像素共享CMOS图像传感器","authors":"Shin Sakai, Y. Tashiro, N. Akahane, R. Kuroda, K. Mizobuchi, S. Sugawa","doi":"10.1109/ESSCIRC.2009.5326026","DOIUrl":null,"url":null,"abstract":"A lateral overflow integration capacitor (LOFIC) based CMOS image sensor sharing two pixels and without row-select transistors has been developed using a newly added lateral overflow gate which directly connects the photodiode and the LOFIC. A 0.18-µm, 2-Poly 3-Metal CMOS technology with a buried pinned photodiode process was employed for the fabrication of the CMOS image sensor having 1/3.3-inch optical format, 1280<sup>H</sup> × 960<sup>V</sup> pixels, and RGB Bayer color filter and on-chip micro-lens on each pixel. The fabricated CMOS image sensor exhibits a high conversion gain of 84-µV/e<sup>-</sup> and a high full well capacity of 6.9 × 10<sup>4</sup>-e<sup>-</sup> in spite of its pixel size of 3.0 × 3.0-µm<sup>2</sup>.","PeriodicalId":258889,"journal":{"name":"2009 Proceedings of ESSCIRC","volume":"45 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-11-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":"{\"title\":\"A pixel-shared CMOS image sensor using lateral overflow gate\",\"authors\":\"Shin Sakai, Y. Tashiro, N. Akahane, R. Kuroda, K. Mizobuchi, S. Sugawa\",\"doi\":\"10.1109/ESSCIRC.2009.5326026\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A lateral overflow integration capacitor (LOFIC) based CMOS image sensor sharing two pixels and without row-select transistors has been developed using a newly added lateral overflow gate which directly connects the photodiode and the LOFIC. A 0.18-µm, 2-Poly 3-Metal CMOS technology with a buried pinned photodiode process was employed for the fabrication of the CMOS image sensor having 1/3.3-inch optical format, 1280<sup>H</sup> × 960<sup>V</sup> pixels, and RGB Bayer color filter and on-chip micro-lens on each pixel. The fabricated CMOS image sensor exhibits a high conversion gain of 84-µV/e<sup>-</sup> and a high full well capacity of 6.9 × 10<sup>4</sup>-e<sup>-</sup> in spite of its pixel size of 3.0 × 3.0-µm<sup>2</sup>.\",\"PeriodicalId\":258889,\"journal\":{\"name\":\"2009 Proceedings of ESSCIRC\",\"volume\":\"45 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2009-11-10\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"6\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2009 Proceedings of ESSCIRC\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ESSCIRC.2009.5326026\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 Proceedings of ESSCIRC","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ESSCIRC.2009.5326026","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A pixel-shared CMOS image sensor using lateral overflow gate
A lateral overflow integration capacitor (LOFIC) based CMOS image sensor sharing two pixels and without row-select transistors has been developed using a newly added lateral overflow gate which directly connects the photodiode and the LOFIC. A 0.18-µm, 2-Poly 3-Metal CMOS technology with a buried pinned photodiode process was employed for the fabrication of the CMOS image sensor having 1/3.3-inch optical format, 1280H × 960V pixels, and RGB Bayer color filter and on-chip micro-lens on each pixel. The fabricated CMOS image sensor exhibits a high conversion gain of 84-µV/e- and a high full well capacity of 6.9 × 104-e- in spite of its pixel size of 3.0 × 3.0-µm2.