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具有脉冲周期输出的单片电容式压力传感器

1980 IEEE International Solid-State Circuits Conference. Digest of Technical Papers Pub Date : 1900-01-01 DOI:10.1109/ISSCC.1980.1156130
C. Sander, J. Knutti, J. Meindl
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引用次数: 48

摘要

将报道一种批量制造的2.8 × 3.4mm单片电容式压力传感器，取代压阻式压力传感器，采用片上(小于10mm2)电路，在2.5-20V下工作，漏电流为20μA。
本文章由计算机程序翻译，如有差异，请以英文原文为准。
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A monolithic capacitive pressure sensor with pulse-period output
A batch-fabricated 2.8 × 3.4mm monolithic capacitive pressure sensor, replacing piezoresistive pressure transducers, employing on-chip (less than 10mm2) circuitry, with current drain of 20μA operating at 2.5-20V, will be reported.
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1980 IEEE International Solid-State Circuits Conference. Digest of Technical Papers
1980 IEEE International Solid-State Circuits Conference. Digest of Technical Papers
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