了解分层以快速开发汽车应用的可靠封装。通过联锁和锚固来考虑附着力

R. Pufall, M. Goroll, G. M. Reuther
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引用次数: 4

摘要

由热膨胀系数(CTE)的不匹配和温度变化引起的热机械应力仍然是影响半导体元件可靠性的主要问题。这个问题通常是通过将组件暴露在温度循环应力测试中进行一定次数的循环来解决的,然后通过扫描声学显微镜(SAM)来研究分层。关于特定循环条件的讨论,例如使用-65°C/+175°C代替-55°C/+150°C作为循环的最低和最高温度,甚至使用液-液而不是空气-空气循环来加速研究[1],通常是没有意义的,因为没有真正了解循环条件对组件的影响。此外,测试本身不足以确保组件的可靠性,这几乎是不言自明的。可靠性必须从一开始就内置到组件中。因此,问题应该反过来:在压力测试中经过一定次数的循环后,仅仅观察分层是不够的。问题是应该如何设计组件,以及应该如何选择材料来防止分层。因此,重点从测量分层转移到测量粘附。在之前的论文中,提出了一种从可能的材料组合、温度影响(老化、临界诱导应力引起的分层)和界面拓扑等方面更好地理解粘附的方法。本文着重探讨了降低界面应力以降低分层风险的方法。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Understanding delamination for fast development of reliable packages for automotive applications. A consideration of adhesion by interlocking and anchoring
Thermo-mechanical stress caused by the mismatch of coefficients of thermal expansion (CTE) and temperature variations remain a major concern for the reliability of semiconductor components. This issue is usually addressed by exposing the component to temperature cycling stress tests for a certain number of cycles, followed by e.g. scanning acoustic microscopy (SAM) to investigate delamination. Discussions about specific cycling conditions, e.g. using -65 °C/+175 °C instead of -55 °C/+150 °C for the minimum and maximum temperatures of the cycles or even using liquid-liquid instead of air to air cycling to speed up investigations [1], are often moot, because no real understanding of the effect of the cycling conditions on the component is available. Furthermore, it is almost a truism that testing alone does not suffice to ensure the reliability of a component. Reliability has to be built into the components from the beginning. As a consequence, the question should be turned around: it is not enough to look at delamination after a certain number of cycles in a stress test. The question is rather how the component should be designed and how the materials should be chosen to prevent delamination. Thus, the focus is changed from measuring delamination to measuring adhesion. In the previous paper [6] an approach for a better understanding of adhesion in terms of possible material combinations, temperature influence (ageing, delamination due to critical induced stress) and topology of interfaces was presented. This paper focuses on methods to reduce interfacial stresses in order to reduce the risk of delamination.
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