用n/ sub /直流磁控溅射制备[CoB/Pd]/sub /多层垂直磁记录介质

Joint NAPMRC 2003. Digest of Technical Papers Pub Date : 2003-01-06 DOI:10.1109/NAPMRC.2003.1177032

T. Asahi, M. Tanaka, J. Sayama, J. Kawaji, T. Osaka, S. Matsunuma

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引用次数: 2

摘要

采用直流磁控溅射法制备了[CoB/Pd]/sub - n/薄膜，考察了制备条件、氩气中加入n/ sub - 2/以及沉积过程中衬底加热对薄膜微观结构和磁性能的影响。

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Fabrication of [CoB/Pd]/sub n/ multilayered perpendicular magnetic recording media using DC magnetron sputtering with N/sub 2/

[CoB/Pd]/sub n/ films were prepared with dc magnetron sputtering and the effect of preparation conditions, the addition of N/sub 2/ to Ar gas and heating of substrates during the deposition, on its microstructure and magnetic properties were examined.

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Joint NAPMRC 2003. Digest of Technical Papers

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