N. Na, H. Frish, I. Hsieh, Oshrit Harel, Roshan J. George, A. Barkai, H. Rong
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Silicon-on-insulator grating coupler with low back-reflection
We design and fabricate an efficient broadband grating coupler (GC) on a 400nm-thick silicon-on-insulator (SOI) wafer. The measured coupling loss is 2.7dB when coupling to a single-mode fiber (SMF) at 1310nm wavelength with TE polarization. 1dB-full-width and back-reflection are determined to be 30nm and −30dB, respectively.