cvd生长石墨烯纳米带场效应晶体管的输运特性

A. Lyons, A. Behnam, E. Chow, E. Pop
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引用次数: 1

摘要

石墨烯纳米带(gnr)是纳米电子学中很有前途的互连材料或场效应晶体管(fet)[1,2]。以前的GNR研究使用化学衍生的[1]或机械剥离的[2]石墨烯,这对于大规模制造是不实用的。在这项工作中,我们对化学气相沉积(CVD)[3]获得的GNR场效应管进行了全面分析,该方法有望用于制造晶圆级电路。我们展示了低偏置,高偏置和温度相关的测量。我们发现CVD gnr具有与其他方法获得的最佳gnr相当的性能,这表明晶界在亚100 nm器件中起着微不足道的作用。这种方法还有助于确定未来的挑战,并代表了迈向大规模集成的第一步。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Transport properties of CVD-grown graphene nanoribbon field-effect transistors
Graphene nanoribbons (GNRs) are promising candidates for nanoelectronics as interconnects or field-effect transistors (FETs) [1,2]. Previous GNR studies used chemically derived [1] or mechanically exfoliated [2] graphene, which are not practical for large scale fabrication. In this work we present a comprehensive analysis of GNR FETs obtained by chemical vapor deposition (CVD) [3], which is promising for creating wafer-scale circuits. We demonstrate low-bias, high-bias, and temperature-dependent measurements. We find that CVD GNRs have properties comparable to the best state-of-the-art GNRs obtained by other methods, suggesting that grain boundaries play a negligible role in sub-100 nm devices. This approach also serves to identify future challenges and represents a first step towards large-scale integration.
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