不同焊料系统中UBM的应力/强度和可靠性评估

Y. Guo, S. Kuo, L. Mercado
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引用次数: 5

摘要

UBM (Under Bump Metallurgy)可靠性是倒装芯片碰撞技术总体可靠性的关键问题之一。由于UBM的材料和结构因不同的碰撞技术而异,因此需要针对每种设计和工艺确定UBM的强度和可靠性。此外,UBM在热循环过程中承受的应力取决于互连中使用的焊料合金。不同的焊料合金需要不同的UBM结构和强度来实现良好的可靠性热循环。在本研究中,建立了一个简化的应力模型来确定热循环过程中的UBM应力。本文还建立了一种简化的UBM强度应力模型。这些模型用于预测共晶和高铅焊料系统在模拉试验和热循环条件下的应力和强度。本文还讨论了一种利用拉拔试验结果评估UBM可靠性的方法。这种方法可以扩展到其他焊料系统的ubm研究。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Stress/strength and reliability evaluations on UBM in different solder systems
UBM (Under Bump Metallurgy) reliability is one of the critical issues in the total reliability of a flip-chip bumping technology. Since the UBM materials and structures vary for different bumping technologies, the UBM strength and reliability need to be determined for each design and process. In addition, the stress that a UBM experiences during thermal cycles depends on the solder alloy used in the interconnect. Different solder alloys require different UBM structures and strengths to achieve good reliability thermal cycling. In this study, a simplified stress model is developed to determine the UBM stress during thermal cycling. A simplified stress model for the UBM strength is also developed. These models are used to predict the stress and strength of the UBM under the die pull test and the thermal cycle conditions for both eutectic and high lead solder systems. A methodology for using the pull test results to evaluate UBM reliability is also discussed. This methodology can be extended to the studies of UBMs with other solder systems.
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