脉冲电源产生的非热等离子体去除排放气体中稀释的SF/sub - 6/

Conference Record of the Twenty-Fifth International Power Modulator Symposium, 2002 and 2002 High-Voltage Workshop. Pub Date : 2002-06-30 DOI:10.1109/MODSYM.2002.1189545

Y. Minamitani, Y. Abe, Y. Higashiyama

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引用次数: 0

摘要

研究了利用脉冲功率产生的非热等离子体去除SF/sub - 6/的方法。研究了放电功率和施加脉冲电压极性对SF/sub /去除率的影响。放电功率随电容器的放电重复率或充电电压而变化。随着放电功率的增大，SF/sub / is的去除率增大。较高的脉冲重复率比较大的充电电压值更能有效地去除SF/sub /。当通过改变停留时间或重复率向样品气体提供相同的放电能量时，在短停留时间和高重复率下去除率高。负脉冲对SF/sub 6/的去除率高于正脉冲。因此，脉冲功率产生的非热等离子体可以有效地完全去除稀释的SF/sub - 6/气体。

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Removal of dilute SF/sub 6/ in emission gas by nonthermal plasma generated by pulsed power

Investigation on removal method of SF/sub 6/ was carried out by using nonthermal plasma generated by pulsed power. We investigated the dependence of the discharge power and the polarity of applied pulsed voltage to the reactor on the removal rate of SF/sub 6/. The discharge power is varied with discharge repetition rate or charging voltage of the capacitor. As the discharge power increases, the removal rate of SF/sub 6/ is increases. The high repetition rate of pulse is more effective for removal of SF/sub 6/ than the big value of charging voltage. When the same discharge energy is supplied to the sample gas by changing the residence time or repetition rate, the removal rate is high in short residence time and high repetition rate. The removal rate of SF/sub 6/ for negative pulses is higher than that for positive ones. Consequently, the nonthermal plasma generated by pulsed power is effective to remove dilute SF/sub 6/ gas completely.

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Conference Record of the Twenty-Fifth International Power Modulator Symposium, 2002 and 2002 High-Voltage Workshop.

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