Maximization design of thrust force for cross-coupled 2 DOF planar direct drive motor

A cross-coupled 2-DOF planar direct drive motor that realizes a motion along with 2 directions independently has been developed. This paper completes the derivation of magnetic flux density by planar magnet. The derived equation is validated by comparing calculation result and analysis result by electromagnetic analysis. This paper also calculates theoretical thrust force by theoretical equation of derived magnetic flux density. The theoretical thrust force is validated by experiment with actual equipment. In addition, the optimal ratio about magnet length and width under same volume is clarified from the perspective of maximization of interlinkage magnetic flux. It is proved that the ratio has only one point to maximize the interlinkage magnetic flux. This derived optimized ratio is also validated by comparing calculation result and analysis result.