在250nm SiGe BiCMOS技术中,n-MOS晶体管的累积应力退化促进了冲击电离

Gutierrez D. Edmundo A., Otero C. Alan Y., F. Xiomara Ribero
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引用次数: 0

摘要

介绍了250 nm SiGe BiCMOS技术的n型MOSFET在老化测试条件下的冲击电离增强实验观察。晶体管的电气特性,如漏极电流能力、跨导性和阈值电压随应力时间的变化而降低,并遵循幂律。而以热载流子体电流测量的冲击电离随老化过程而增强。通过与数值模拟的比较,我们证实了这种冲击电离增强归因于漏侧纵向电场的增强。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
n-MOS transistor impact ionization boosted by cumulative stress degradation in a 250 nm SiGe BiCMOS technology
We introduce experimental observations of impact ionization boosting in n-type MOSFET of a 250 nm SiGe BiCMOS technology, when operated under aging test conditions. The electrical characteristics of the transistor, such as drain current capability, transconductance, and threshold voltage degrade with the stress time following a power law as expected. However, the impact ionization measured as the hot-carrier bulk current enhances with the aging process. By comparison with numerical simulations, we corroborate that such an impact ionization boosting is attributed to an enhancement of the longitudinal electric field at the drain side.
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