用透明ITO固定电极研究静电伺服加速度计的运动

TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers Pub Date : 1991-06-24 DOI:10.1109/SENSOR.1991.148812

B. Kloeck, S. Suzuki, S. Tsuchitani, M. Miki, M. Matsumoto, K. Sato, A. Koide, Y. Sugisawa

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引用次数: 5

摘要

介绍了一种用于传感器和执行器的新型薄膜材料:氧化铟锡(ITO)。ITO具有结合低电阻率和高视觉透明度的独特特性。采用直流溅射法制备了ITO薄膜，形成电容式伺服加速度计的固定电极。由于加速度计的活动电极在传感器的实际工作过程中是可见的，因此可以研究其在各种条件下的行为。本文研究了高静电电压下可动电极的运动及其对传感器测量范围的影响。通过对加速度计的温度性能的评估，说明了ITO对大规模生产的好处。

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Motion investigation of electrostatic servo-accelerometers by means of transparent ITO fixed electrodes

The authors introduce a novel thin film material for sensors and actuators: indium tin oxide (ITO). ITO has the unique feature of combining low electrical resistivity and high visual transparency. Thin ITO films were deposited by DC-sputtering to form the fixed electrodes of a capacitive servo-accelerometer. Since the movable electrode of the accelerometer is visible during real operation of the sensor, its behavior can be studied under various conditions. One investigation presented is a study of the motion of the movable electrode at high electrostatic voltages, and its effect on the measurement range of the sensor. The benefits of ITO for mass production are illustrated by means of the evaluation of the temperature behavior of the accelerometers.<>

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TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers

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