传递长度法提取金属-石墨烯接触电阻的可靠性分析

2018 IEEE International Conference on Microelectronic Test Structures (ICMTS) Pub Date : 2018-03-19 DOI:10.1109/ICMTS.2018.8383765

S. Venica, F. Driussi, A. Gahoi, S. Kataria, P. Palestri, Max C. Lenirne, Luca Scimi

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引用次数: 6

摘要

传递长度法是一种成熟的表征接触电阻半导体器件特性的实验技术。然而，它的可靠性是金属-石墨烯接触的问题。我们深入研究了提取的接触电阻值的si误差，并提出了限制这种误差和获得可靠结果的策略，该方法已成功地应用于具有低接触金属的样品。

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Reliability analysis of the metal-graphene contact resistance extracted by the transfer length method

The transfer Length Method is a well-estab experimental technique to characterize the contact resista semiconductor devices. However, its dependability is ques for metal-graphene contacts. We investigate in-depth the si cal error of the extracted contact resistance values and we strategies to limit such error and to obtain reliable result method has been successfully applied to samples with dil contact metals.

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2018 IEEE International Conference on Microelectronic Test Structures (ICMTS)

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