短通道mos中热电子俘获引起的有效通道长度变化

D. J. Coe
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引用次数: 3

摘要

在雪崩前区域,p沟道mos的应力操作会导致热电子注入到源极和漏极附近的栅极氧化物中。这种注入电荷的捕获导致应力结附近阈值电压的局部降低,从而导致有效通道长度的减小。饱和输出电导的测量表明,选择性电荷捕获后,早期效应大大降低。这一现象可以解释为,应力晶体管是由许多具有不同阈值电压的串联m.o.s.t.s组成的复合器件,并且可以有意地用于减少小型m.o.s.t.s中的短通道效应。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Changes in effective channel length due to hot-electron trapping in short-channel m.o.s.t.s
Stressed operation of p-channel m.o.s.t.s in the pre-avalanche region can cause the injection of hot electrons into the gate oxide adjacent to the source and drain junction. Trapping of this injected charge causes a localised reduction of the threshold voltage near the stressed junction and a consequent reduction of the effective channel length. Measurement of the saturated output conductance shows that the Early effect is much reduced after selective charge trapping. The phenomenon can be explained by regarding the stressed transistors as a composite device consisting of a number of series-connected m.o.s.t.s with differing threshold voltages, and can be used deliberately to reduce short-channel effects in small m.o.s.t.s.
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