基于MEMS的表面声波-气体传感器建模以获得更高的灵敏度

2019 3rd International Conference on Electronics, Materials Engineering & Nano-Technology (IEMENTech) Pub Date : 2019-08-01 DOI:10.1109/IEMENTech48150.2019.8981327

N. V. Teja, N. Harathi, A. Sarkar, K. S. Priya

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引用次数: 1

摘要

重点介绍了基于表面声波(SAW)的挥发性气体传感器的建模和分析。传感现象依赖于质量加载效应。在COMSOL multiphysics中考虑有限元建模进行建模。通过分析目标分析物在不同浓度下暴露时的谐振频率来研究其传感性能。谐振频率的变化决定了灵敏度。在调查过程中观察到高灵敏度。

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Modeling of MEMS based Surface Acoustic Wave-Gas Sensor to Obtain Enhanced Sensitivity

Modeling and analysis of surface acoustic wave (SAW) based volatile gas sensor is highlighted here. Sensing phenomenon is relying on mass loading effect. Modeling is performed in COMSOL MULTYPHYSICS by considering finite element modeling. Sensing performance is investigated by analyzing he resonant frequency on exposure of target analyte at different concentration. Change in resonant frequency determines the sensitivity. High sensitivity is observed during the investigation.

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来源期刊

2019 3rd International Conference on Electronics, Materials Engineering & Nano-Technology (IEMENTech)

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