S. Messner, M. Muller, V. Burger, J. Schaible, H. Sandmaier, R. Zengerle
{"title":"一种常闭，双金属驱动三通微阀，用于气动应用","authors":"S. Messner, M. Muller, V. Burger, J. Schaible, H. Sandmaier, R. Zengerle","doi":"10.1109/MEMSYS.1998.659726","DOIUrl":null,"url":null,"abstract":"A new normally-closed 3-way microvalve for pneumatic applications is presented for the first time. The valve is driven by a bimetallic actuation principle. This paper discusses the dimensioning and design, the fabrication and the experimental results of the 3-way valve. The valve is designed to control differential pressures of 1000 kPa. Flow rates up to 800 ml/min for dry air at 600 kPa can be achieved. The power consumption is about 1 W. The valve has been tested successfully in an ambient temperature range from 0 to 50/spl deg/C.","PeriodicalId":340972,"journal":{"name":"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176","volume":"34 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-01-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"21","resultStr":"{\"title\":\"A normally-closed, bimetallically actuated 3-way microvalve for pneumatic applications\",\"authors\":\"S. Messner, M. Muller, V. Burger, J. Schaible, H. Sandmaier, R. Zengerle\",\"doi\":\"10.1109/MEMSYS.1998.659726\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A new normally-closed 3-way microvalve for pneumatic applications is presented for the first time. The valve is driven by a bimetallic actuation principle. This paper discusses the dimensioning and design, the fabrication and the experimental results of the 3-way valve. The valve is designed to control differential pressures of 1000 kPa. Flow rates up to 800 ml/min for dry air at 600 kPa can be achieved. The power consumption is about 1 W. The valve has been tested successfully in an ambient temperature range from 0 to 50/spl deg/C.\",\"PeriodicalId\":340972,\"journal\":{\"name\":\"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176\",\"volume\":\"34 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1998-01-25\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"21\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.1998.659726\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.1998.659726","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A normally-closed, bimetallically actuated 3-way microvalve for pneumatic applications
A new normally-closed 3-way microvalve for pneumatic applications is presented for the first time. The valve is driven by a bimetallic actuation principle. This paper discusses the dimensioning and design, the fabrication and the experimental results of the 3-way valve. The valve is designed to control differential pressures of 1000 kPa. Flow rates up to 800 ml/min for dry air at 600 kPa can be achieved. The power consumption is about 1 W. The valve has been tested successfully in an ambient temperature range from 0 to 50/spl deg/C.
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