电光记忆光电探测器中光控灯丝动力学的研究(会议报告)

C. Weilenmann, F. Ducry, S. Andermatt, B. Cheng, Mila Lewerenz, P. Ma, J. Leuthold, A. Emboras, M. Luisier
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引用次数: 0

摘要

原子标志着摩尔定律的最终尺度限制,这就是为什么原子尺度设备吸引了电子工业的重大研究兴趣。为了实现电子学和光子学的有效协整,光电探测器[1]和调制器[2]等关键组件应与电子设备的占地面积相匹配。在这里,我们展示了第一个原子尺度的等离子体光电探测器,其中原子而不是电子负责器件的操作。这个概念是基于所谓的电化学金属化(ECM)电池,其中原子尺度的导电灯丝通过等离子体热效应部分溶解。为了实现这种新型光电探测器,三种不同的颠覆性技术被结合到一个单一的制造过程中。首先,在绝缘体上硅(SOI)衬底上开发了一种基于改进的硅局部氧化自对准方法(LOCOS)的三维光子技术。这是重要的一步,因为它使基于尖端的原子尺度等离子体在低损耗总线光子波导内的集成成为可能。其次,采用两个电子束光刻步骤和一个提升工艺制备了垂直三维绝热等离子体耦合器。由此产生的容纳ECM电池的金属-绝缘体-金属(MIM)波导由一个银和一个铂触点组成,中间间隔20纳米。最后,通过电铸银灯丝在ECM电池内实现了原子级结。为了研究该光电探测器的工作原理,建立了三维轴对称有限元模型,该模型能够自一致地模拟器件电阻随外加电压和温度的变化。两个电极之间导电丝的电化学生长和溶解模拟了Refs的工作。[3]和[4]。通过器件的电流近似为隧道电流,其对灯丝状态的依赖关系可以从从头算量子输运计算中推导出来。通过考虑金属-绝缘体界面处的双电层,该器件的微观性质也被考虑在内,该双电层准确地描述了ECM器件内的静电势分布。结合第一性原理的结果[5]使我们能够显著地减少自由参数的数量。确定并研究了两种光-物质相互作用机制,即作用在单个灯丝原子上的光力和金属中通过电磁耗散产生的加热。一项基于实时时变密度泛函理论的原子学研究表明,光力不足以移动单个原子,这使得光诱导温度成为灯丝溶解背后的主要驱动力。在本文中,我们将通过精确的设备模拟表明,这确实是正在发生的事情:金属-绝缘体界面温度的变化强烈影响这两个区域之间的电子传递速率,这解释了观察到的设备行为。模拟和实验之间的定量一致将被证明,从而开辟了未来计算机辅助设计原子尺度光电探测器的可能性。文献[1]Emboras et al. doi:10.1021/acsnano。[2] Emboras等。doi:10.1021/acs.nanolett。5 b04537[3]门泽尔。[4] Lin等。doi:10.1109/IEDM.2012.6479107[5] Ducry等。doi:10.1109/IEDM.2017.8268324
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Investigation of light-controlled filament dynamics in an electro-optical memristive photodetector (Conference Presentation)
The atom marks the ultimate scaling limit of Moore’s law, which is why atomic scale devices have attracted significant research interests from the electronics industry. To allow efficient co-integration of electronics and photonics, key components such as photodetectors [1] and modulators [2] should match the footprint of electronic devices. Here we demonstrate the first atomic-scale plasmonic photodetector where atoms rather than electrons are responsible for the device operation. The concept is based on a so-called electro-chemical metallization (ECM) cell where an atomic-scale conductive filament is partially dissolved through a plasmonic-thermal effect. To realize this new type of photodetectors, three different disruptive technologies have been combined into one single fabrication process. First, a 3-D photonic technology based on a modified self-aligned approach of local-oxidation of silicon (LOCOS) has been developed for silicon-on-insulator (SOI) substrates. This is an important step as it enables the integration of tip-based atomic-scale plasmonics within a low-loss bus photonic waveguide. Second, vertical 3-D adiabatic plasmonic couplers have been fabricated using two e-beam lithography steps and a lift off process. The resulting metal-insulator-metal (MIM) waveguide that houses the ECM cell consists of a silver and a platinum contact separated by a gap of 20 nanometers. Finally, the atomic scale junction has been realized by electroforming a silver filament inside the ECM cell. To investigate the operation principle of this photodetector, a 3-D axis-symmetrical finite element method (FEM) model has been implemented that is able to self-consistently simulate the device resistance as a function of the applied voltage and temperature. The electrochemical growth and dissolution of a conductive filament between two electrodes is modeled analogously to the work of Refs. [3] and [4]. The current through the device is approximated as a tunneling current whose dependence on the filament state can be derived from ab initio quantum transport calculations. The microscopic nature of the device is also taken into account by considering an electrical double layer at the metal-insulator interfaces that accurately describes the electrostatic potential distribution within the ECM device. The incorporation of first-principles results [5] allowed us to significantly reduce the number of free parameters. Two light-matter interaction mechanisms have been identified and investigated, namely the optical force acting on individual filament atoms and the heating through electromagnetic dissipation in the metal. An atomistic study based on real-time time-dependent density-functional theory revealed that the optical forces are not strong enough to move single atoms, which leaves the optically-induced temperature as the main driving force behind the filament dissolution. In this paper we will show through accurate device simulations that this is indeed what is happening: the variation of the temperature at the metal-insulator interfaces strongly affect the electron transfer rates between these two regions, which explains the observed device behavior. Quantitative agreement between simulation and experiments will be demonstrated, thus opening up the possibility of future computer-aided designs of atomic-scale photodetectors. References [1] Emboras et al. doi:10.1021/acsnano.8b01811 [2] Emboras et al. doi:10.1021/acs.nanolett.5b04537 [3] Menzel. doi:10.1007/s10825-017-1051-2 [4] Lin et al. doi:10.1109/IEDM.2012.6479107 [5] Ducry et al. doi:10.1109/IEDM.2017.8268324
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