自参考多晶硅TFT放大器读出线性图像传感器

Proceedings of IEEE International Electron Devices Meeting Pub Date : 1993-12-05 DOI:10.1109/IEDM.1993.347234

I. Fujieda, F. Okumura, K. Sera, H. Asada, H. Sekine

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引用次数: 3

摘要

提出了一种基于薄膜晶体管(TFT)放大器的线性图像传感器读出方案。每个像素提供一个TFT放大器和额外的TFT电路，允许放大器的自校准。利用准分子激光退火技术，采用低温多晶硅工艺成功制备了传感器原型。

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Self-referenced poly-Si TFT amplifier readout for a linear image sensor

A readout scheme with thin film transistor (TFT) amplifier is proposed for a linear image sensor. Each pixel is provided with a TFT amplifier and additional TFT circuits which allow self-calibration of the amplifier. Prototype sensors were successfully fabricated by the low-temperature poly-Si process utilizing excimer laser annealing.<>

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Proceedings of IEEE International Electron Devices Meeting

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