化学浴沉积法生长p-CuO/n-Si异质结薄膜厚度依赖性光伏性能研究

J. Sultana, S. Paul, Sansthita Chowdhury, A. Karmakar, S. Chattopadhyay
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引用次数: 0

摘要

采用化学浴沉积(CBD)技术在硅(n-Si)衬底上生长了氧化铜(p-CuO)薄膜,随着沉积时间的变化,薄膜厚度在60 ~ 178 nm之间变化。观察到生长薄膜的化学成分和光伏特性显著依赖于它们的厚度。通过FESEM、EDAX和椭偏测量,详细研究了这种厚度相关的化学成分和结构变化。通过测量p-CuO/n- si异质结太阳能电池的短路电流密度(JSC)、开路电压(VOC)、填充系数(FF)和效率(n),研究了CuO薄膜厚度变化对其性能的影响。在n- si衬底上生长10 min、平均厚度为110 nm的p-CuO薄膜具有最佳的光伏性能。本研究提出了采用适当活性层厚度的化学浴沉积法制备高质量光电用CuO薄膜的技术路线。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Film thickness dependent photovoltaic performance investigation of p-CuO/n-Si heterojunctions grown by chemical bath deposition process
Thin films of cupric oxide (p-CuO) are grown on silicon (n-Si) substrates by using chemical bath deposition (CBD) technique and the thickness is varied in the range of 60 nm to 178 nm by varying the deposition time. The chemical composition and photovoltaic properties of the grown films are observed to depend significantly on their thickness. FESEM, EDAX and ellipsometric measurements have been conducted to investigate such thickness dependent chemical composition and structural variation in detail. Also, the impact of thickness variation of CuO films on the performance of p-CuO/n-Si heterojunction solar cells has been studied by measuring its short-circuit current density (JSC), open-circuit voltage (VOC), fill-factor (FF) and efficiency (n). The 10-min CBD grown thin film of p-CuO with 110 nm average thickness on n-Si substrate provides the optimal photovoltaic performance. The study suggests a technological route for developing high quality CuO thin film for photovoltaic applications by employing chemical bath deposition method with appropriate active layer thickness.
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